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Features
1) 0 to 18 bar range (261 PSI)
2) Media resistive pressure sensor die
3) Typical output Span 150mV @ 5 V
4) Output span 150 mV @ 5 V
5) Temperature range -40°…+150°C
6) Linearity 0.15% (typical)
7) Die size 1.79 x 1.35 mm2
8) Pads on one side
9) Low cost, high reliability & stability
10) Absolute pressure sensor

Applications
Harsh environments

Description
The MS7204-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7204-A2 is suitable for media-resistive applications.